EMAT – Antwerpen

Floor vibration isolation for High End TEM

Recently installed advanced Transmission Electron Microscope had limited performance due to strong floor vibration induced by combination of surrounding equipments, footfall and foundation structural dynamics. Excessive floor vibration amplitude resulted in unacceptable large distortions on HR- High Mag STEM images.

MD-ECS has designed a tailor-made solution of active vibration isolation modules and customized platform to  support the entire TEM inclusive its covers and panels. The TEM has been lifted up carefully allowing to place the AVI modules and platform under the TEM. The setup was completed in one day. The load adjustment, operation verification, vibration measurement and evaluation with respect to TEM floor vibration requirement were conducted in the following day.

The offered vibration isolation solution has shown significant improvement both on vibration measurement data and HR-STEM imaging results.